DETERMINATION OF MAIN ELECTRICAL PARAMETERS OF Au-4H-n-SiC (MS) AND Au-Al2O3-4H-n-SiC (MIS) DEVICES
dc.contributor.author | Demir, Gulcin Ersoz | |
dc.contributor.author | Yucedag, Ibrahim | |
dc.date.accessioned | 2021-12-01T18:47:43Z | |
dc.date.available | 2021-12-01T18:47:43Z | |
dc.date.issued | 2021 | |
dc.department | [Belirlenecek] | en_US |
dc.description.abstract | In this study, Au-4H-n-SiC metal-semiconductor (MS) and Au-Al2O3-4H-n-SiC metal-insulator-semiconductor (MIS) devices were fabricated to examine the effects on the performance of electronic devices of interfacial insulating materials. In order to determine the dielectric properties, capacitance/conductance-voltage (C/G-V) measurements were realized in a wide range of voltages (-3.0 V)-(11.0 V). Current-voltage (I-V) measurements to obtain the electric properties were realized at +/- 2:5V. Moreover, both the energy distributions of surface states (N-ss) and series resistance (R-s) were obtained from the C/G-V data. Obtained results provided that series resistance originating from interfacial layer (Al2O3) was more effective on the I-V and C/G-V characteristics which must be taken into account in the calculation of main electrical parameters. The rectification ratio (RR) and shunt resistance (R-sh) of the MIS device were almost 10(3) times greater than those of the MS structure. Using Al2O3 between Au and 4H-n-SiC also led to an increase in the value of barrier height (BH) and a decrease in the value of ideality factor (n). These results confirmed that Al2O3 layer leads to an increase in the performance of MS device with respect to low values of N-ss, reverse saturation current (I-0) and n and high values of RR, R-sh and BH. | en_US |
dc.identifier.doi | 10.1142/S0218625X21500360 | |
dc.identifier.issn | 0218-625X | |
dc.identifier.issn | 1793-6667 | |
dc.identifier.issue | 5 | en_US |
dc.identifier.scopus | 2-s2.0-85101978970 | en_US |
dc.identifier.scopusquality | Q3 | en_US |
dc.identifier.uri | https://doi.org/10.1142/S0218625X21500360 | |
dc.identifier.uri | https://hdl.handle.net/20.500.12684/10359 | |
dc.identifier.volume | 28 | en_US |
dc.identifier.wos | WOS:000652587800002 | en_US |
dc.identifier.wosquality | Q4 | en_US |
dc.indekslendigikaynak | Web of Science | en_US |
dc.indekslendigikaynak | Scopus | en_US |
dc.language.iso | en | en_US |
dc.publisher | World Scientific Publ Co Pte Ltd | en_US |
dc.relation.ispartof | Surface Review And Letters | en_US |
dc.relation.publicationcategory | Makale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanı | en_US |
dc.rights | info:eu-repo/semantics/closedAccess | en_US |
dc.subject | Al2O3 interfacial insulator layer | en_US |
dc.subject | comparison of MS and MIS devices | en_US |
dc.subject | voltage and frequency dependence of surface states and series resistance (R-s) | en_US |
dc.subject | Dielectric-Properties | en_US |
dc.subject | Au/N-Si | en_US |
dc.subject | Transport Mechanisms | en_US |
dc.subject | Schottky | en_US |
dc.subject | Behavior | en_US |
dc.subject | Passivation | en_US |
dc.subject | Fabrication | en_US |
dc.subject | Layer | en_US |
dc.subject | Oxide | en_US |
dc.title | DETERMINATION OF MAIN ELECTRICAL PARAMETERS OF Au-4H-n-SiC (MS) AND Au-Al2O3-4H-n-SiC (MIS) DEVICES | en_US |
dc.type | Article | en_US |